Water-cooling electro motor



Principal ASML
Year 2003
Issue Sufficient water cooling to keep coil temperature low enough
Activities
  • Determine worst case power dissipation electro motor
  • Calculate and measure effective heat conductivity of coils
  • Set up thermal model
  • Investigate influence of water cooling channel
    dimensions and water flow
    • Expertise
  • Water cooling
  • Thermal modelling electro motor
  • Pressure drop water channels